FACILITIES
Various sample fabrication sysmtems (deposition, lithography, etching, etc) and measurement apparatuses are available.
Sample Deposition

Magnetron sputtering system with 8 sources (in IB building)

Magnetron sputtering system with 5 sources, No. 1

Magnetron sputtering system with 5 sources, No. 2

Magnetron sputtering system with 6 sources

Electron beam deposition system with 4 sources

Magnetron sputtering system with 3 sources (in IB building)