FACILITIES
Various sample fabrication sysmtems (deposition, lithography, etching, etc) and measurement apparatuses are available.
Sample Deposition
Magnetron sputtering system with 8 sources (in IB building)
Magnetron sputtering system with 5 sources, No. 1
Magnetron sputtering system with 5 sources, No. 2
Magnetron sputtering system with 6 sources
Electron beam deposition system with 4 sources
Magnetron sputtering system with 3 sources (in IB building)
