FACILITIES
Various sample fabrication sysmtems (deposition, lithography, etching, etc) and measurement apparatuses are available.
Sample Deposition
![](/images/facilities-list-image-02.jpg)
Magnetron sputtering system with 8 sources (in IB building)
![](/images/facilities-list-image-11.jpg)
Magnetron sputtering system with 5 sources, No. 1
![](/images/facilities-list-image-12.jpg)
Magnetron sputtering system with 5 sources, No. 2
![](/images/facilities-list-image-13.jpg)
Magnetron sputtering system with 6 sources
![](/images/facilities-list-image-01.jpg)
Electron beam deposition system with 4 sources
![](/images/facilities-list-image-14.jpg)
Magnetron sputtering system with 3 sources (in IB building)